Authors
Murdoch, Gayle;
O'Toole, Martin;
Marti, Giulio;
Pokhrel, Ankit;
Tsvetanova, Diana;
Decoster, Stefan;
Kundu, Souvik;
Oniki, Yusuke;
Thiam, Arame;
Le, Quoc Toan;
Varela Pedreira, Olalla;
Lesniewska, Alicja;
Martinez Alanis, Gerardo Tadeo;
Park, Seongho;
Tokei, Zsolt
ISSN
2158-9682
Conference
VLSI Technology and Circuits
Journal
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
Research discipline
Electrical & electronic engineering
Title
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP
Publication type
Proceedings paper
Embargo date
2022-06-30