Browsing by author "Murdoch, Gayle"
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193nm immersion lithography for high performance silicon photonic circuits
Selvaraja, Shankar; Absil, Philippe; Van Campenhout, Joris; Winroth, Gustaf; Murdoch, Gayle; Locorotondo, Sabrina; Milenin, Alexey; Delvaux, Christie; Ong, Patrick; Sterckx, Gunther; Lepage, Guy; Pathak, Shibnath; Bogaerts, Wim; Van Thourhout, Dries; Xie, Weiqiang (2014) -
Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors
Selvaraja, Shankar; Murdoch, Gayle; Milenin, Alexey; Delvaux, Christie; Ong, Patrick; Pathak, Shibnath; Vermeulen, Diedrik; Sterckx, Gunther; Winroth, Gustaf; Verheyen, Peter; Lepage, Guy; Bogaerts, Wim; Baets, Roel; Van Campenhout, Joris; Absil, Philippe (2012) -
Alternative integration of ultra low-k dielectrics by template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Heylen, Nancy; Murdoch, Gayle; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Buried Power Rail Integration for CMOS Scaling beyond the 3 nm Node
Gupta, Anshul; Tao, Zheng; Radisic, Dunja; Mertens, Hans; Varela Pedreira, Olalla; Demuynck, Steven; Boemmels, Juergen; Devriendt, Katia; Heylen, Nancy; Wang, Shouhua; Kenis, Karine; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; Jourdan, Nicolas; Chan, BT; Subramanian, Sujith; Schleicher, Filip; Peter, Antony; Rassoul, Nouredine; Siew, Yong Kong; Briggs, Basoene; Zhou, Daisy; Rosseel, Erik; Capogreco, Elena; Mannaert, Geert; Sepulveda Marquez, Alfonso; Dupuy, Emmanuel; Vandersmissen, Kevin; Chehab, Bilal; Murdoch, Gayle; Altamirano Sanchez, Efrain; Biesemans, Serge; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022) -
Buried Power Rail Metal exploration towards the 1 nm Node
Gupta, Anshul; Radisic, Dunja; Maes, J.W.; Varela Pedreira, Olalla; Soulie, Jean-Philippe; Jourdan, Nicolas; Mertens, Hans; Bandyopadhyay, Sudip; Le, Quoc Toan; Pacco, Antoine; Heylen, Nancy; Vandersmissen, Kevin; Devriendt, Katia; Zhu, C.; Datta, S.; Sebaai, Farid; Wang, S.; Mousa, M.; Lee, J.; Geypen, Jef; De Wachter, Bart; Chehab, Bilal; Salahuddin, Shairfe Muhammad; Murdoch, Gayle; Biesemans, Serge; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond
Gupta, Anshul; Varela Pedreira, Olalla; Tao, Zheng; Mertens, Hans; Radisic, Dunja; Jourdan, Nicolas; Devriendt, Katia; Heylen, Nancy; Wang, Shouhua; Chehab, Bilal; Jang, Doyoung; Hellings, Geert; Sebaai, Farid; Lorant, Christophe; Teugels, Lieve; Peter, Antony; Chan, BT; Schleicher, Filip; Demonie, Ingrid; Marien, Philippe; Sepulveda Marquez, Alfonso; Richard, Olivier; Nagesh, Nishanth; Lesniewska, Alicja; Lazzarino, Frederic; Ryckaert, Julien; Morin, Pierre; Altamirano Sanchez, Efrain; Murdoch, Gayle; Boemmels, Juergen; Demuynck, Steven; Na, Myung Hee; Tokei, Zsolt; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto (2020) -
Comparison of LFLE and LELE manufacturability
Miller, Andy; Maenhoudt, Mireille; Vangoidsenhoven, Diziana; Murdoch, Gayle; Shioya, Takeo; Hoshiko, Kenji (2008) -
Controlled cobalt recess for advanced interconnect metallization
Pacco, Antoine; Akanishi, Yuya; Le, Quoc Toan; Kesters, Els; Murdoch, Gayle; Holsteyns, Frank (2019) -
Controlled cobalt recess for advanced interconnect metallization
Pacco, Antoine; Akanishi, Yuya; Murdoch, Gayle; Le, Quoc Toan; Holsteyns, Frank (2019) -
Cu passivation for integration of gap-filling ultralow-k dielectrics
Zhang, Liping; de Marneffe, Jean-Francois; Lesniewska, Alicja; Verdonck, Patrick; Heylen, Nancy; Murdoch, Gayle; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt; De Gendt, Stefan; Baklanov, Mikhail (2016) -
CVD based selective Co deposition on Cu and W for via pre-fill
Chen, Phil; Zheng, Jun-Fei; Lieten, Ruben; Frye, Asa; Baum, Thomas; O'Neill, James; van der Veen, Marleen; Murdoch, Gayle; Boemmels, Juergen; Tokei, Zsolt; Xu, Jeff; Zhu, John; Bao, Jerry; Badaroglu, Mustafa; Yeap, Geoffrey (2016) -
Damage free integration of ultralow-k dielectrics by template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Heylen, Nancy; Murdoch, Gayle; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control
Finders, Jo; Dusa, Mircea; Vleeming, Bert; Fliervoet, Timon; Hepp, Birgitt; Megens, henry; Groenendijk, Remco; Quaedackers, John; Mos, Evert; Leewis, Christian; Bornebroek, Frank; Maenhoudt, Mireille; Leblans, Marc; Vandeweyer, Tom; Murdoch, Gayle; Altamirano Sanchez, Efrain (2009) -
Downscaling area-selective deposition to sub-30 nm half-pitch lines
Pasquali, Mattia; Murdoch, Gayle; Tokei, Zsolt; De Gendt, Stefan; Armini, Silvia (2019) -
Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
Montero Alvarez, Daniel; Vega Gonzalez, Victor; Feurprier, Yannick; Varela Pedreira, Olalla; Oikawa, Noriaki; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Puliyalil, Harinarayanan; Versluijs, Janko; De Coster, Hanne; Bazzazian, Nina; Jourdan, Nicolas; Kumar, Kaushik; Lazzarino, Frederic; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2022-06-29) -
EPE analysis of sub-N10 BEOL structures with Coventor's SEMulator3D
Franke, Joern-Holger; Murdoch, Gayle; Halder, Sandip (2017) -
Evaluation of post etch residue cleaning solutions for the removal of TiN hardmask after dry etch of low-k dielectric materials on 45 nm pitch interconnects
Payne, Makonnen; Lippy, Steve; Lieten, Ruben; Kesters, Els; Le, Quoc Toan; Murdoch, Gayle; Vega Gonzalez, Victor; Holsteyns, Frank (2016) -
Exploration of BEOL line-space patterning options at 12nm half-pitch and below
Decoster, Stefan; Lazzarino, Frederic; Petersen Barbosa Lima, Lucas; Li, Waikin; Versluijs, Janko; Halder, Sandip; Mallik, Arindam; Murdoch, Gayle (2018) -
Feasibility study of fully self aligned vias for 5nm node BEOL
Murdoch, Gayle; Boemmels, Juergen; Wilson, Chris; Babaei Gavan, Khashayar; Le, Quoc Toan; Tokei, Zsolt; Clark, William (2017)