Publication:

193nm immersion lithography for high performance silicon photonic circuits

Date

2014
Proceedings Paper
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Author(s)

Selvaraja, Shankar
;
Absil, Philippe  
;
Van Campenhout, Joris  
;
Winroth, Gustaf
;
Murdoch, Gayle  
;
Locorotondo, Sabrina  
;
Milenin, Alexey  
;
Delvaux, Christie  
;
Ong, Patrick  
;
Sterckx, Gunther  
;
Lepage, Guy  
;
Pathak, Shibnath
;
Bogaerts, Wim  
;
Van Thourhout, Dries  
;
Xie, Weiqiang

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