Publication:

193nm immersion lithography for high performance silicon photonic circuits

Date

2014

Proceedings Paper

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Files

28210.pdf 868.43 KB

Author(s)

Selvaraja, Shankar

;

Absil, Philippe

;

Van Campenhout, Joris

;

Winroth, Gustaf

;

;

Locorotondo, Sabrina

;

Milenin, Alexey

;

Delvaux, Christie

;

;

Sterckx, Gunther

;

;

Pathak, Shibnath

;

;

Van Thourhout, Dries

;

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2069 since deposited on 2021-10-22

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