193nm immersion lithography for high performance silicon photonic circuits

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Author(s)

Selvaraja, Shankar

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Absil, Philippe

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Van Campenhout, Joris

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Winroth, Gustaf

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Locorotondo, Sabrina

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Milenin, Alexey

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Delvaux, Christie

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;

Sterckx, Gunther

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;

Pathak, Shibnath

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;

Van Thourhout, Dries

;

Metrics

1 since deposited on 2021-10-22

Acq. date: 2025-10-24

2060 since deposited on 2021-10-22

Acq. date: 2025-10-24