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Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond
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Authors
Gupta, Anshul
;
Varela Pedreira, Olalla
;
Tao, Zheng
;
Mertens, Hans
;
Radisic, Dunja
;
Jourdan, Nicolas
;
Devriendt, Katia
;
Heylen, Nancy
;
Wang, Shouhua
;
Chehab, Bilal
;
Jang, Doyoung
;
Hellings, Geert
;
Sebaai, Farid
;
Lorant, Christophe
;
Teugels, Lieve
;
Peter, Antony
;
Chan, BT
;
Schleicher, Filip
;
Demonie, Ingrid
;
Marien, Philippe
;
Sepulveda Marquez, Alfonso
;
Richard, Olivier
;
Nagesh, Nishanth
;
Lesniewska, Alicja
;
Lazzarino, Frederic
;
Ryckaert, Julien
;
Morin, Pierre
;
Altamirano Sanchez, Efrain
;
Murdoch, Gayle
;
Boemmels, Juergen
;
Demuynck, Steven
;
Na, Myung Hee
;
Tokei, Zsolt
;
Biesemans, Serge
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
DOI
10.1109/IEDM13553.2020.9371970
EISBN
978-1-7281-8888-1
ISSN
2380-9248
Conference
IEEE International Electron Devices Meeting (IEDM)
Journal
na
Title
Buried Power Rail Scaling and Metal Assessment for the 3 nm Node and Beyond
Publication type
Proceedings paper
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Conference contributions
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Date
Summary
2
20.500.12860/38537.2
*
2021-12-16T11:59:30Z
validation by library/open access desk
1
20.500.12860/38537
2021-12-06T02:06:16Z
*Selected version
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