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Conference contributions
Controlled cobalt recess for advanced interconnect metallization
Publication:
Controlled cobalt recess for advanced interconnect metallization
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Akanishi, Yuya
;
Murdoch, Gayle
;
Le, Quoc Toan
;
Holsteyns, Frank
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1939
since deposited on 2021-10-27
1
last month
Acq. date: 2026-01-09
Citations
Metrics
Views
1939
since deposited on 2021-10-27
1
last month
Acq. date: 2026-01-09
Citations