Publication:

Cu passivation for integration of gap-filling ultralow-k dielectrics

Date

2016

Journal article

Simple item page Full metadata Statistics

Files

34314.pdf 1.7 MB

Author(s)

;

de Marneffe, Jean-Francois

;

Lesniewska, Alicja

;

Verdonck, Patrick

;

;

;

;

Boemmels, Juergen

;

;

De Gendt, Stefan

;

Baklanov, Mikhail

Journal

Applied Physics Letters

Statistics

1978 since deposited on 2021-10-23

Acq. date: 2026-09-14