Cu passivation for integration of gap-filling ultralow-k dielectrics

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Authors

Zhang, Liping; de Marneffe, Jean-Francois; Lesniewska, Alicja; Verdonck, Patrick; Heylen, Nancy; Murdoch, Gayle; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt; De Gendt, Stefan; Baklanov, Mikhail

ISSN

0003-6951

Issue

23

Journal

Applied Physics Letters

Volume

109

Title

Cu passivation for integration of gap-filling ultralow-k dielectrics

Publication type

Journal article

Embargo date

9999-12-31

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