Publication:

Cu passivation for integration of gap-filling ultralow-k dielectrics

Date

2016
Journal article
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Author(s)

Zhang, Liping  
;
de Marneffe, Jean-Francois  
;
Lesniewska, Alicja  
;
Verdonck, Patrick  
;
Heylen, Nancy  
;
Murdoch, Gayle  
;
Croes, Kristof  
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
De Gendt, Stefan  
;
Baklanov, Mikhail

Journal

Applied Physics Letters

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