Publication:

Cu passivation for integration of gap-filling ultralow-k dielectrics

Date

2016
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

34314.pdf 1.7 MB

Author(s)

Zhang, Liping  
;
de Marneffe, Jean-Francois  
;
Lesniewska, Alicja  
;
Verdonck, Patrick  
;
Heylen, Nancy  
;
Murdoch, Gayle  
;
Croes, Kristof  
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
De Gendt, Stefan  
;
Baklanov, Mikhail

Journal

Applied Physics Letters

Abstract

Description

Statistics

Views

1971 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-01-26

Citations

Statistics

Views

1971 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-01-26

Citations