Authors

Finders, Jo; Dusa, Mircea; Vleeming, Bert; Fliervoet, Timon; Hepp, Birgitt; Megens, henry; Groenendijk, Remco; Quaedackers, John; Mos, Evert; Leewis, Christian; Bornebroek, Frank; Maenhoudt, Mireille; Leblans, Marc; Vandeweyer, Tom; Murdoch, Gayle; Altamirano Sanchez, Efrain

Conference

Optical Microlithography XXII

Title

Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control

Publication type

Proceedings paper

Embargo date

9999-12-31