Publication:

Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control

Date

2009

Proceedings Paper

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Files

18864.pdf 1.03 MB

Author(s)

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Fliervoet, Timon

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Groenendijk, Remco

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Quaedackers, John

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Leewis, Christian

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Bornebroek, Frank

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Maenhoudt, Mireille

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Vandeweyer, Tom

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Altamirano Sanchez, Efrain

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Acq. date: 2026-03-18