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Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors
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1998 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-11
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Metrics
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1998 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-11
Citations