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Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors
Publication:
Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors
Date
2012
Proceedings Paper
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25195.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Selvaraja, Shankar
;
Murdoch, Gayle
;
Milenin, Alexey
;
Delvaux, Christie
;
Ong, Patrick
;
Pathak, Shibnath
;
Vermeulen, Diedrik
;
Sterckx, Gunther
;
Winroth, Gustaf
;
Verheyen, Peter
;
Lepage, Guy
;
Bogaerts, Wim
;
Baets, Roel
;
Van Campenhout, Joris
;
Absil, Philippe
Journal
Abstract
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Views
1992
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1992
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations