Feasibility study of fully self aligned vias for 5nm node BEOL

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Authors
Murdoch, Gayle; Boemmels, Juergen; Wilson, Chris; Babaei Gavan, Khashayar; Le, Quoc Toan; Tokei, Zsolt; Clark, William
Conference
IEEE International Interconnect Technology Conference - IITC
Title
Feasibility study of fully self aligned vias for 5nm node BEOL
Publication type
Proceedings paper
Embargo date
9999-12-31
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