Publication:

Feasibility study of fully self aligned vias for 5nm node BEOL

Date

2017
Proceedings Paper
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dc.contributor.authorMurdoch, Gayle
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorBabaei Gavan, Khashayar
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorTokei, Zsolt
dc.contributor.authorClark, William
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorBabaei Gavan, Khashayar
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.accessioned2021-10-24T09:47:28Z
dc.date.available2021-10-24T09:47:28Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29039
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7968958/
dc.source.beginpage1
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate16/05/2017
dc.source.conferencelocationHsinchu Taiwan
dc.source.endpage4
dc.title

Feasibility study of fully self aligned vias for 5nm node BEOL

dc.typeProceedings paper
dspace.entity.typePublication
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