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Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
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Authors
Montero Alvarez, Daniel
;
Vega Gonzalez, Victor
;
Feurprier, Yannick
;
Varela Pedreira, Olalla
;
Oikawa, Noriaki
;
Martinez Alanis, Gerardo Tadeo
;
Batuk, Dmitry
;
Puliyalil, Harinarayanan
;
Versluijs, Janko
;
De Coster, Hanne
;
Bazzazian, Nina
;
Jourdan, Nicolas
;
Kumar, Kaushik
;
Lazzarino, Frederic
;
Murdoch, Gayle
;
Park, Seongho
;
Tokei, Zsolt
DOI
10.1109/IITC52079.2022.9881321
Conference
IITC2022
Research discipline
Applied physics
Title
Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
Publication type
Proceedings paper
Embargo date
2022-06-27
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Summary
2
20.500.12860/40771.2
*
2024-04-09T08:30:00Z
validation by library/open access desk
1
20.500.12860/40771
2022-11-23T13:52:23Z
*Selected version
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