Browsing by author "De Coster, Hanne"
Now showing items 1-8 of 8
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Enabling 3-level High Aspect Ratio Supervias for 3nm nodes and below
Montero Alvarez, Daniel; Vega Gonzalez, Victor; Feurprier, Yannick; Varela Pedreira, Olalla; Oikawa, Noriaki; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Puliyalil, Harinarayanan; Versluijs, Janko; De Coster, Hanne; Bazzazian, Nina; Jourdan, Nicolas; Kumar, Kaushik; Lazzarino, Frederic; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2022-06-29) -
Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track Standard Cell Architecture as Scaling Booster
Marien, Philippe; Vega Gonzalez, Victor; Choudhury, Subhobroto; Radisic, Dunja; Decoster, Stefan; Kundu, Shreya; Hermans, Yannick; Kenens, Bart; De Coster, Hanne; Altamirano Sanchez, Efrain; Peter, Antony; Sepulveda Marquez, Alfonso; Jourdan, Nicolas; Batuk, Dmitry; Ryckaert, Julien; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt (2023) -
Kinetics of chemical etching in nano-confined volumes
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2016) -
Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
Vega Gonzalez, Victor; Radisic, Dunja; Choudhury, Subhobroto; Tierno, Davide; Thiam, Arame; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Seidel, Felix; Decoster, Stefan; Kundu, Souvik; Tsvetanova, Diana; Peter, Antony; De Coster, Hanne; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Chan, BT; Drissi, Youssef; Sherazi, Yasser; Lee, Jae Uk; Ciofi, Ivan; Murdoch, Gayle; Nagesh, Nishanth; Hellings, Geert; Ryckaert, Julien; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto; Park, Seongho; Tokei, Zsolt (2022) -
Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions
Le, Quoc Toan; Arslan, Esen; Rip, Jens; De Coster, Hanne; Verdonck, Patrick; Radisic, Dunja; Schleicher, Filip; Vaesen, Inge; Conard, Thierry; Altamirano Sanchez, Efrain (2023) -
Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch
Vereecke, Guy; De Coster, Hanne; Dochain, Denis; Nurekeyeva, Kunsulu; Conlan, Shona; Nsimba, Anthony; Wostyn, Kurt; Altamirano Sanchez, Efrain (2023) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2017) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Van Alphen, Senne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2018)