Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors

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Authors
Vereecke, Guy; De Coster, Hanne; Van Alphen, Senne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
200
Title
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Publication type
Journal article
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