Publication:
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
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2010 since deposited on 2021-10-26
2last month
Acq. date: 2026-01-08
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Metrics
Views
2010 since deposited on 2021-10-26
2last month
Acq. date: 2026-01-08
Citations