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Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
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2008 since deposited on 2021-10-26
1last month
Acq. date: 2025-12-15
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Metrics
Views
2008 since deposited on 2021-10-26
1last month
Acq. date: 2025-12-15
Citations