Publication:
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
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2011 since deposited on 2021-10-26
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Acq. date: 2026-02-25
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2011 since deposited on 2021-10-26
1last month
1last week
Acq. date: 2026-02-25
Citations