Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors

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Authors
Vereecke, Guy; De Coster, Hanne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank
Conference
Surface Preparation and Cleaning Conference - SPCC
Title
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Publication type
Proceedings paper
Embargo date
9999-12-31
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