Publication:

Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors

Date

2017
Proceedings Paper
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Author(s)

Vereecke, Guy  
;
De Coster, Hanne  
;
Carolan, Patrick  
;
Bender, Hugo  
;
Willems, Kherim  
;
Ragnarsson, Lars-Ake  
;
Van Dorpe, Pol  
;
Horiguchi, Naoto  
;
Holsteyns, Frank  

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