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Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
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Authors
Vega Gonzalez, Victor
;
Radisic, Dunja
;
Choudhury, Subhobroto
;
Tierno, Davide
;
Thiam, Arame
;
Batuk, Dmitry
;
Martinez Alanis, Gerardo Tadeo
;
Seidel, Felix
;
Decoster, Stefan
;
Kundu, Souvik
;
Tsvetanova, Diana
;
Peter, Antony
;
De Coster, Hanne
;
Sepulveda Marquez, Alfonso
;
Altamirano Sanchez, Efrain
;
Chan, BT
;
Drissi, Youssef
;
Sherazi, Yasser
;
Lee, Jae Uk
;
Ciofi, Ivan
;
Murdoch, Gayle
;
Nagesh, Nishanth
;
Hellings, Geert
;
Ryckaert, Julien
;
Biesemans, Serge
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
;
Park, Seongho
;
Tokei, Zsolt
DOI
10.1109/IEDM45625.2022.10019483
EISBN
978-1-6654-8959-1
ISSN
2380-9248
Conference
International Electron Devices Meeting (IEDM)
Journal
na
Title
Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
Publication type
Proceedings paper
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Summary
2
20.500.12860/41616.2
*
2023-06-02T06:56:16Z
validation by library/open access desk
1
20.500.12860/41616
2023-05-25T20:20:00Z
*Selected version
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