Publication:

Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells

Date

2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019483
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Author(s)

Vega Gonzalez, Victor  
;
Radisic, Dunja  
;
Choudhury, Subhobroto  
;
Tierno, Davide  
;
Thiam, Arame  
;
Batuk, Dmitry  
;
Martinez Alanis, Gerardo Tadeo  
;
Seidel, Felix  
;
Decoster, Stefan  
;
Kundu, Souvik  
;
Tsvetanova, Diana  
;
Peter, Antony  
;
De Coster, Hanne  
;
Sepulveda Marquez, Alfonso  
;
Altamirano Sanchez, Efrain  
;
Chan, BT  
;
Drissi, Youssef  
;
Sherazi, Yasser  
;
Lee, Jae Uk  
;
Ciofi, Ivan  
;
Murdoch, Gayle  
;
Nagesh, Nishanth  
;
Hellings, Geert  
;
Ryckaert, Julien  
;
Biesemans, Serge  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  
;
Park, Seongho  
;
Tokei, Zsolt  

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na

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1224 since deposited on 2023-05-25
Acq. date: 2026-02-27

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1224 since deposited on 2023-05-25
Acq. date: 2026-02-27

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