Publication:

Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells

Date

2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019483
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dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorRadisic, Dunja
dc.contributor.authorChoudhury, Subhobroto
dc.contributor.authorTierno, Davide
dc.contributor.authorThiam, Arame
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorMartinez Alanis, Gerardo Tadeo
dc.contributor.authorSeidel, Felix
dc.contributor.authorDecoster, Stefan
dc.contributor.authorKundu, Souvik
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorPeter, Antony
dc.contributor.authorDe Coster, Hanne
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorChan, BT
dc.contributor.authorDrissi, Youssef
dc.contributor.authorSherazi, Yasser
dc.contributor.authorLee, Jae Uk
dc.contributor.authorCiofi, Ivan
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorChoudhury, Subhobroto
dc.contributor.imecauthorTierno, Davide
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorMartinez Alanis, Gerardo Tadeo
dc.contributor.imecauthorSeidel, Felix
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorKundu, Souvik
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorDe Coster, Hanne
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDrissi, Youssef
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.orcidimecVega Gonzalez, Victor::0000-0002-4320-0585
dc.contributor.orcidimecTierno, Davide::0000-0003-4915-904X
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMartinez Alanis, Gerardo Tadeo::0000-0001-5036-0491
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecTsvetanova, Diana::0000-0002-5632-5539
dc.contributor.orcidimecPeter, Antony::0000-0001-5941-0563
dc.contributor.orcidimecDe Coster, Hanne::0000-0002-5968-7703
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2023-06-02T07:20:11Z
dc.date.available2023-05-25T20:20:00Z
dc.date.available2023-06-02T07:20:11Z
dc.date.issued2022
dc.identifier.doi10.1109/IEDM45625.2022.10019483
dc.identifier.eisbn978-1-6654-8959-1
dc.identifier.issn2380-9248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41616
dc.publisherIEEE
dc.source.conferenceInternational Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 03-07, 2022
dc.source.conferencelocationSan Francisco
dc.source.journalna
dc.source.numberofpages4
dc.title

Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells

dc.typeProceedings paper
dspace.entity.typePublication
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