Browsing by author "Lee, Jae Uk"
Now showing items 1-20 of 22
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21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
2D self-aligned via patterning strategy with EUV single exposure in 3nm technology
Choi, Suhyeong; Lee, Jae Uk; Blanco, Victor; Kim, Ryan Ryoung han; Shin, Youngsoo (2017) -
CNT EUV pellicle:moving towards a full-size solution
Timmermans, Marina; Pollentier, Ivan; Lee, Jae Uk; Meersschaut, Johan; Richard, Olivier; Adelmann, Christoph; Huyghebaert, Cedric; Gallagher, Emily (2017) -
CNTs in the context of EUV pellicle history
Gallagher, Emily; Timmermans, Marina; Pollentier, Ivan; Lee, Jae Uk; Mariano Juste, Marina; Adelmann, Christoph; Huyghebaert, Cedric; Scholze, Frank; Laubis, Christian (2018) -
Concurrent design rule, OPC and process optimization in EUV lithography
Xu, Dongbo; Gillijns, Werner; Tan, Ling Ee; Lee, Jae Uk; Kim, Ryan Ryoung han (2020) -
Design, patterning, and process integration overview for 2nm node
Sherazi, Yasser; Chang, Yi-Han; Drissi, Youssef; Chehab, Bilal; Vega Gonzalez, Victor; Kim, Ryan Ryoung Han; Lee, Jae Uk (2022) -
EUV lithography imaging using novel pellicle membranes
Pollentier, Ivan; Vanpaemel, Johannes; Lee, Jae Uk; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Gallagher, Emily (2016) -
EUV low-n attenuated phase-shift mask on random logic Via single patterning at pitch 36nm
Tan, Ling Ee; Gillijns, Werner; Lee, Jae Uk; Xu, Dongbo; Van de Kerkhove, Jeroen; Philipsen, Vicky; Kim, Ryan Ryoung han (2022-05-26) -
IMEC N7, N5 and beyond: DTCO, STCO and EUV insertion strategy to maintain affordable scaling trend
Kim, Ryan Ryoung han; Sherazi, Yasser; Debacker, Peter; Raghavan, Praveen; Ryckaert, Julien; Mallik, Arindam; Verkest, Diederik; Lee, Jae Uk; Gillijns, Werner; Tan, Ling Ee; Blanco, Victor; Ronse, Kurt; McIntyre, Greg (2018) -
Introducing the EUV CNT pellicle
Lee, Jae Uk; Vanpaemel, Johannes; Pollentier, Ivan; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Timmermans, Marina; De Volder, Michael; Gallagher, Emily (2016) -
Introducing the euv cnt pellicle
Gallagher, Emily; Huyghebaert, Cedric; Lee, Jae Uk; Pollentier, Ivan; Timmermans, Marina; Zahedmanesh, Houman (2016) -
Large marginal 2D self-aligned via patterning for sub-5nm technology
Choi, Suhyeong; Lee, Jae Uk; Blanco, Victor; Debacker, Peter; Raghavan, Praveen; Kim, Ryan Ryoung han; Shin, Youngsoo (2017) -
Multi-Patterning Options for 5nm and Below_SADP, SAQP, SALELE
Lee, Jae Uk; Apoorva, Oak; Ryoung han, Kim; David, Abercrombie; Rehab, Kotb Ali; Ahmed, Hamed-Fatehy (2019) -
Novel membrane solutions for the EUV pellicle : better or not ?
Pollentier, Ivan; Lee, Jae Uk; Timmermans, Marina; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Gallagher, Emily (2017) -
Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
Vega Gonzalez, Victor; Montero Alvarez, Daniel; Versluijs, Janko; Varela Pedreira, Olalla; Jourdan, Nicolas; Puliyalil, Harinarayanan; Chehab, Bilal; Peissker, Tobias; Haider, Ali; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Geypen, Jef; Le, Quoc Toan; Bazzazian, Nina; Heylen, Nancy; van der Veen, Marleen; El-Mekki, Zaid; Webers, Tomas; Vats, H.; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Gillijns, Werner; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Ciofi, Ivan; De Wachter, Bart; Swerts, Johan; Grieten, Eva; Ercken, Monique; Kim, Ryan Ryoung han; Croes, Kristof; Leray, Philippe; Jaysankar, Manoj; Nagesh, Nishanth; Ramakers, Leon; Murdoch, Gayle; Park, Seongho; Tokei, Zsolt; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021) -
Properties and performance of EUVL pellicle membranes
Gallagher, Emily; Vanpaemel, Johannes; Pollentier, Ivan; Zahedmanesh, Houman; Adelmann, Christoph; Huyghebaert, Cedric; Jonckheere, Rik; Lee, Jae Uk (2015) -
Properties and performance of EUVL pellicle membranes
Gallagher, Emily; Vanpaemel, Johannes; Pollentier, Ivan; Zahedmanesh, Houman; Adelmann, Christoph; Huyghebaert, Cedric; Jonckheere, Rik; Lee, Jae Uk (2015) -
SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node
Lee, Jae Uk; Choi, Soo Han; Yasser, Sherazi; Ryan Ryoung han, Kim (2019) -
Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
Vega Gonzalez, Victor; Radisic, Dunja; Choudhury, Subhobroto; Tierno, Davide; Thiam, Arame; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Seidel, Felix; Decoster, Stefan; Kundu, Souvik; Tsvetanova, Diana; Peter, Antony; De Coster, Hanne; Sepulveda Marquez, Alfonso; Altamirano Sanchez, Efrain; Chan, BT; Drissi, Youssef; Sherazi, Yasser; Lee, Jae Uk; Ciofi, Ivan; Murdoch, Gayle; Nagesh, Nishanth; Hellings, Geert; Ryckaert, Julien; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto; Park, Seongho; Tokei, Zsolt (2022) -
Supervia Process Integration and Reliability Compared to Stacked Vias Using Barrierless Ruthenium
Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Versluijs, Janko; Lesniewska, Alicja; Varela Pedreira, Olalla; Baert, Rogier; Paolillo, Sara; Decoster, Stefan; Schleicher, Filip; Montero Alvarez, Daniel; Bekaert, Joost; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Teugels, Lieve; Heylen, Nancy; Jourdan, Nicolas; El-Mekki, Zaid; van der Veen, Marleen; Ciofi, Ivan; Briggs, Basoene; Heijlen, Jeroen; Dupas, Luc; De Wachter, Bart; Vancoille, Eric; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Demonie, Ingrid; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Jaysankar, Manoj; Wilson, Chris; Murdoch, Gayle; Tokei, Zsolt (2020)