Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Metadata
Show full item record
Authors
Vega Gonzalez, Victor
;
Wilson, Chris
;
Paolillo, Sara
;
Decoster, Stefan
;
Mao, Ming
;
Versluijs, Janko
;
Blanco, Victor
;
Kesters, Els
;
Le, Quoc Toan
;
Lorant, Christophe
;
Varela Pedreira, Olalla
;
Lesniewska, Alicja
;
Heylen, Nancy
;
El-Mekki, Zaid
;
van der Veen, Marleen
;
Webers, Tomas
;
Vats, Hemant
;
Rynders, Luc
;
Cupak, Miroslav
;
Lee, Jae Uk
;
Drissi, Youssef
;
Halipre, Luc
;
Charley, Anne-Laure
;
Verdonck, Patrick
;
Witters, Thomas
;
Van Gompel, Sander
;
Kimura, Yosuke
;
Jourdan, Nicolas
;
Ciofi, Ivan
;
Contino, Antonino
;
Boccardi, Guillaume
;
Lariviere, Stephane
;
De Wachter, Bart
;
Vancoille, Eric
;
Lazzarino, Frederic
;
Ercken, Monique
;
Kim, Ryan Ryoung han
;
Trivkovic, Darko
;
Croes, Kristof
;
Leray, Philippe
;
Pardons, Katrien
;
Barla, Kathy
;
Tokei, Zsolt
Conference
IEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
Title
21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Publication type
Proceedings paper
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login