Publication:

21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization

Date

2019
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorWilson, Chris
dc.contributor.authorPaolillo, Sara
dc.contributor.authorDecoster, Stefan
dc.contributor.authorMao, Ming
dc.contributor.authorVersluijs, Janko
dc.contributor.authorBlanco, Victor
dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorLorant, Christophe
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorHeylen, Nancy
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorWebers, Tomas
dc.contributor.authorVats, Hemant
dc.contributor.authorRynders, Luc
dc.contributor.authorCupak, Miroslav
dc.contributor.authorLee, Jae Uk
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorMao, Ming
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorWebers, Tomas
dc.contributor.imecauthorVats, Hemant
dc.contributor.imecauthorRynders, Luc
dc.contributor.imecauthorCupak, Miroslav
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-27T22:12:27Z
dc.date.available2021-10-27T22:12:27Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34338
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
dc.source.beginpage3.4
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.title

21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions