Publication:

21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization

Date

2019
Proceedings Paper
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Author(s)

Vega Gonzalez, Victor  
;
Wilson, Chris  
;
Paolillo, Sara  
;
Decoster, Stefan  
;
Mao, Ming  
;
Versluijs, Janko  
;
Blanco, Victor  
;
Kesters, Els  
;
Le, Quoc Toan  
;
Lorant, Christophe  
;
Varela Pedreira, Olalla  
;
Lesniewska, Alicja  
;
Heylen, Nancy  
;
El-Mekki, Zaid  
;
van der Veen, Marleen  
;
Webers, Tomas  
;
Vats, Hemant
;
Rynders, Luc  
;
Cupak, Miroslav  
;
Lee, Jae Uk  
;
Drissi, Youssef  
;
Halipre, Luc  
;
Charley, Anne-Laure  
;
Verdonck, Patrick  
;
Witters, Thomas  
;
Van Gompel, Sander  
;
Kimura, Yosuke  
;
Jourdan, Nicolas  
;
Ciofi, Ivan  
;
Contino, Antonino  
;
Boccardi, Guillaume  
;
Lariviere, Stephane  
;
De Wachter, Bart  
;
Vancoille, Eric  
;
Lazzarino, Frederic  
;
Ercken, Monique  
;
Kim, Ryan Ryoung han
;
Trivkovic, Darko  
;
Croes, Kristof  
;
Leray, Philippe  
;
Pardons, Katrien  
;
Barla, Kathy  
;
Tokei, Zsolt  

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Acq. date: 2025-12-11

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