Publication:

CNT EUV pellicle:moving towards a full-size solution

Date

2017

Proceedings Paper

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Files

37048.pdf 1.38 MB

Author(s)

Timmermans, Marina

;

Pollentier, Ivan

;

;

Meersschaut, Johan

;

Richard, Olivier

;

Adelmann, Christoph

;

Huyghebaert, Cedric

;

Gallagher, Emily

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Acq. date: 2026-08-08