Publication:

CNT EUV pellicle:moving towards a full-size solution

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

37048.pdf 1.38 MB

Author(s)

Timmermans, Marina

;

Pollentier, Ivan

;

;

Meersschaut, Johan

;

Richard, Olivier

;

Adelmann, Christoph

;

Huyghebaert, Cedric

;

Gallagher, Emily

Metrics

1928 since deposited on 2021-10-24

Acq. date: 2025-12-17