Publication:
SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node
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1 since deposited on 2021-10-27
Acq. date: 2026-02-26
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2139 since deposited on 2021-10-27
Acq. date: 2026-02-26
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1 since deposited on 2021-10-27
Acq. date: 2026-02-26
Views
2139 since deposited on 2021-10-27
Acq. date: 2026-02-26
Citations