Authors

Lee, Jae Uk; Choi, Soo Han; Yasser, Sherazi; Ryan Ryoung han, Kim

Conference

Design-Process-Technology Co-optimization for Manufacturability XIII

Title

SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node

Publication type

Meeting abstract

Embargo date

9999-12-31