Publication:

SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node

Date

2019
Meeting abstract
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-9434-5055
cris.virtual.orcid0009-0002-3327-5169
cris.virtualsource.departmenta7b597d5-f100-4ae8-8e80-26a0e56883d2
cris.virtualsource.department3133fd1f-edd3-4f57-83bd-255a85992bcd
cris.virtualsource.orcida7b597d5-f100-4ae8-8e80-26a0e56883d2
cris.virtualsource.orcid3133fd1f-edd3-4f57-83bd-255a85992bcd
dc.contributor.authorLee, Jae Uk
dc.contributor.authorChoi, Soo Han
dc.contributor.authorYasser, Sherazi
dc.contributor.authorKim, Ryan Ryoung Han
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.date.accessioned2021-10-27T12:13:54Z
dc.date.available2021-10-27T12:13:54Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33389
dc.identifier.urlhttps://doi.org/10.1117/12.2515216
dc.source.beginpage109620N
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIII
dc.source.conferencedate24/02/2019
dc.source.conferencelocationSan Jose, CA USA
dc.title

SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node

dc.typeMeeting abstract
dspace.entity.typePublication
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