Publication:
SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-27
Acq. date: 2026-07-14
Views
2150 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-07-14
Citations
Statistics
Downloads
1 since deposited on 2021-10-27
Acq. date: 2026-07-14
Views
2150 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-07-14
Citations