Novel membrane solutions for the EUV pellicle : better or not ?

Thumbnail
View/open
Metadata
Show full item record
Authors
Pollentier, Ivan; Lee, Jae Uk; Timmermans, Marina; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Gallagher, Emily
DOI
10.1117/12.2257891
Conference
Extreme Ultraviolet (EUV) Lithography VIII
Title
Novel membrane solutions for the EUV pellicle : better or not ?
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections