Publication:

Novel membrane solutions for the EUV pellicle : better or not ?

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2257891

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34689.pdf 696.65 KB

Author(s)

Pollentier, Ivan

;

;

Timmermans, Marina

;

Adelmann, Christoph

;

Zahedmanesh, Houman

;

Huyghebaert, Cedric

;

Gallagher, Emily

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1987 since deposited on 2021-10-24

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Acq. date: 2026-06-05