Properties and performance of EUVL pellicle membranes

Thumbnail
View/open
Metadata
Show full item record
Authors
Gallagher, Emily; Vanpaemel, Johannes; Pollentier, Ivan; Zahedmanesh, Houman; Adelmann, Christoph; Huyghebaert, Cedric; Jonckheere, Rik; Lee, Jae Uk
Conference
International Symposium on Extreme Ultraviolet Lithography
Title
Properties and performance of EUVL pellicle membranes
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections