Publication:

Properties and performance of EUVL pellicle membranes

Date

2015
Proceedings Paper
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dc.contributor.authorGallagher, Emily
dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorPollentier, Ivan
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorJonckheere, Rik
dc.contributor.authorLee, Jae Uk
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.date.accessioned2021-10-22T19:17:48Z
dc.date.available2021-10-22T19:17:48Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25283
dc.identifier.urlhttp://euvlsymposium.lbl.gov/pdf/2015/Oral_Wednesday/Session10_Pellicle,%20Mask%20Cleaning%20and%20Thermal%20Expansion/S10.3_Gal
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography
dc.source.conferencedate5/10/2015
dc.source.conferencelocationMaastricht The Netherlands
dc.title

Properties and performance of EUVL pellicle membranes

dc.typeProceedings paper
dspace.entity.typePublication
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