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CNTs in the context of EUV pellicle history
Publication:
CNTs in the context of EUV pellicle history
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gallagher, Emily
;
Timmermans, Marina
;
Pollentier, Ivan
;
Lee, Jae Uk
;
Mariano Juste, Marina
;
Adelmann, Christoph
;
Huyghebaert, Cedric
;
Scholze, Frank
;
Laubis, Christian
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1946
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Acq. date: 2025-12-10
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Metrics
Views
1946
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-10
Citations