Publication:

CNTs in the context of EUV pellicle history

Date

2018

Proceedings Paper

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Files

37026.pdf 612.87 KB

Author(s)

Gallagher, Emily

;

Timmermans, Marina

;

Pollentier, Ivan

;

;

Mariano Juste, Marina

;

Adelmann, Christoph

;

Huyghebaert, Cedric

;

;

Laubis, Christian

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Acq. date: 2026-01-26