Publication:

CNTs in the context of EUV pellicle history

Date

2018
Proceedings Paper
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dc.contributor.authorGallagher, Emily
dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorLee, Jae Uk
dc.contributor.authorMariano Juste, Marina
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorScholze, Frank
dc.contributor.authorLaubis, Christian
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-25T18:49:38Z
dc.date.available2021-10-25T18:49:38Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30736
dc.identifier.urlhttps://doi.org/10.1117/12.2297710
dc.source.beginpage105831E
dc.source.conferenceSPIE Advanced Lithogarphy
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.title

CNTs in the context of EUV pellicle history

dc.typeProceedings paper
dspace.entity.typePublication
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