Publication:

Introducing the EUV CNT pellicle

Date

2016

Meeting abstract

Simple item page Full metadata Statistics

Files

33871.pdf 753.17 KB

Author(s)

;

Vanpaemel, Johannes

;

Pollentier, Ivan

;

Adelmann, Christoph

;

Zahedmanesh, Houman

;

Huyghebaert, Cedric

;

Timmermans, Marina

;

De Volder, Michael

;

Gallagher, Emily

Metrics

1960 since deposited on 2021-10-23

Acq. date: 2026-01-11