Publication:

Introducing the EUV CNT pellicle

Date

2016
Meeting abstract
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dc.contributor.authorLee, Jae Uk
dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorPollentier, Ivan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTimmermans, Marina
dc.contributor.authorDe Volder, Michael
dc.contributor.authorGallagher, Emily
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.accessioned2021-10-23T12:05:37Z
dc.date.available2021-10-23T12:05:37Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26885
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2577345
dc.source.beginpage99850C
dc.source.conferencePhotomask Technology 2016
dc.source.conferencedate12/09/2016
dc.source.conferencelocationSan Jose, CA USA
dc.title

Introducing the EUV CNT pellicle

dc.typeMeeting abstract
dspace.entity.typePublication
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