Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Introducing the EUV CNT pellicle
Publication:
Introducing the EUV CNT pellicle
Date
2016
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
33871.pdf
753.17 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lee, Jae Uk
;
Vanpaemel, Johannes
;
Pollentier, Ivan
;
Adelmann, Christoph
;
Zahedmanesh, Houman
;
Huyghebaert, Cedric
;
Timmermans, Marina
;
De Volder, Michael
;
Gallagher, Emily
Journal
Abstract
Description
Metrics
Views
1959
since deposited on 2021-10-23
Acq. date: 2025-10-24
Citations
Metrics
Views
1959
since deposited on 2021-10-23
Acq. date: 2025-10-24
Citations