Multi-Patterning Options for 5nm and Below_SADP, SAQP, SALELE

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Authors

Lee, Jae Uk; Apoorva, Oak; Ryoung han, Kim; David, Abercrombie; Rehab, Kotb Ali; Ahmed, Hamed-Fatehy

Journal

White paper on Mentor graphics

Title

Multi-Patterning Options for 5nm and Below_SADP, SAQP, SALELE

Publication type

Journal article

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