Publication:
Multi-Patterning Options for 5nm and Below_SADP, SAQP, SALELE
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-0926-848X | |
| cris.virtual.orcid | 0000-0002-9434-5055 | |
| cris.virtual.orcid | 0009-0002-3327-5169 | |
| cris.virtualsource.department | 358fc7a1-f40e-4b11-91b3-d75922de09bb | |
| cris.virtualsource.department | a7b597d5-f100-4ae8-8e80-26a0e56883d2 | |
| cris.virtualsource.department | 3133fd1f-edd3-4f57-83bd-255a85992bcd | |
| cris.virtualsource.orcid | 358fc7a1-f40e-4b11-91b3-d75922de09bb | |
| cris.virtualsource.orcid | a7b597d5-f100-4ae8-8e80-26a0e56883d2 | |
| cris.virtualsource.orcid | 3133fd1f-edd3-4f57-83bd-255a85992bcd | |
| dc.contributor.author | Lee, Jae Uk | |
| dc.contributor.author | Oak, Apoorva | |
| dc.contributor.author | Kim, Ryan Ryoung Han | |
| dc.contributor.author | David, Abercrombie | |
| dc.contributor.author | Rehab, Kotb Ali | |
| dc.contributor.author | Ahmed, Hamed-Fatehy | |
| dc.contributor.imecauthor | Lee, Jae Uk | |
| dc.contributor.orcidimec | Lee, Jae Uk::0000-0002-9434-5055 | |
| dc.date.accessioned | 2021-10-27T12:13:27Z | |
| dc.date.available | 2021-10-27T12:13:27Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33388 | |
| dc.identifier.url | https://go.mentor.com/55TT4 | |
| dc.source.journal | White paper on Mentor graphics | |
| dc.title | Multi-Patterning Options for 5nm and Below_SADP, SAQP, SALELE | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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