Browsing by author "Ciofi, Ivan"
Now showing items 1-20 of 101
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21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers
Goethals, Frederik; Baklanov, Mikhaïl; Ciofi, Ivan; Detavernier, Christophe; Van Der Voort, Pascal; Van Driessche, Isabel (2012) -
A Novel System-Level Physics-based Electromigration Modelling Framework: Application to the Power Delivery Network
Zahedmanesh, Houman; Ciofi, Ivan; Zografos, Odysseas; Badaroglu, Mustafa; Croes, Kristof (2021) -
A pragmatic network-aware paradigm for system-level electromigration predictions at scale
Zahedmanesh, Houman; Roussel, Philippe; Ciofi, Ivan; Croes, Kristof (2023) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Alternative metals: from ab initio screening to calibrated narrow line models
Adelmann, Christoph; Sankaran, Kiroubanand; Dutta, Shibesh; Gupta, Anshul; Kundu, Shreya; Jamieson, Geraldine; Moors, Kristof; Pinna, Nicolo; Ciofi, Ivan; Van Elshocht, Sven; Boemmels, Juergen; Boccardi, Guillaume; Wilson, Chris; Pourtois, Geoffrey; Tokei, Zsolt (2018) -
Assessment of critical Co electromigration parameters
Varela Pedreira, Olalla; Lofrano, Melina; Zahedmanesh, Houman; Roussel, Philippe; van der Veen, Marleen; Simons, Veerle; Chery, Emmanuel; Ciofi, Ivan; Croes, Kristof (2022) -
Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Wen, Liang Gong; Roussel, Philippe; Varela Pedreira, Olalla; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela Ioana; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph (2016-09) -
Calibrated Modeling of Line-to-Line Dielectric Reliability: LER Specs to Meet Reliability Constraints at Operating Conditions
Ciofi, Ivan; Roussel, Philippe; Saad, Yves; Melvin, Lawrence; Wilson, Chris; Croes, Kristof (2019) -
Capacitance measurements and K-value extractions of low-K films
Ciofi, Ivan; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2010) -
Challenges for Interconnect Reliability: From Element to System Level
Varela Pedreira, Olalla; Zahedmanesh, Houman; Ding, Youqi; Ciofi, Ivan; Croes, Kristof (2023) -
Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry
Kim, Tae-Gon; Verdonck, Patrick; Ciofi, Ivan; Barbarin, Yohan; Tokei, Zsolt; Baklanov, Mikhaïl (2013) -
Characterization of plasma damage in low-k films by TVS measurements
Ciofi, Ivan; Baklanov, Mikhaïl; Calbo, Giovanni; Tokei, Zsolt; Beyer, Gerald (2009) -
Circuit and process co-design with vertical gate-all-around nanowire FET technology to extend CMOS scaling for 5nm and beyond technologies
Huynh Bao, Trong; Yakimets, Dmitry; Ryckaert, Julien; Ciofi, Ivan; Baert, Rogier; Veloso, Anabela; Boemmels, Juergen; Collaert, Nadine; Roussel, Philippe; Demuynck, Steven; Raghavan, Praveen; Mercha, Abdelkarim; Tokei, Zsolt; Verkest, Diederik; Thean, Aaron; Wambacq, Piet (2014-09) -
Circuit delay and power benchmark of graphene against Cu interconnects
Contino, Antonino; Ciofi, Ivan; Baert, Rogier; Wu, Xiangyu; Asselberghs, Inge; Celano, Umberto; Wilson, Chris; Tokei, Zsolt; Groeseneken, Guido; Soree, Bart (2019) -
CMOS 32nm technology node: business as usual for interconnect damascene patterning?
Beyer, Gerald; Ciofi, Ivan; Van Olmen, Jan; Carbonell, Laure; Versluijs, Janko; Wiaux, Vincent; Op de Beeck, Maaike; Maenhoudt, Mireille; Struyf, Herbert; Hendrickx, Dirk; de Marneffe, Jean-Francois; Vereecke, Guy; Claes, Martine; Bearda, Twan; Volders, Henny; Heylen, Nancy; Travaly, Youssef; Stucchi, Michele; Tokei, Zsolt; Cartuyvels, Rudi (2008-12) -
Correlation between field dependent electrical conduction and dielectric breakdown in a SiOCH based low-k (k=2.0) dielectric
Wu, Chen; Li, Yunlong; Barbarin, Yohan; Ciofi, Ivan; Croes, Kristof; Boemmels, Juergen; De Wolf, Ingrid; Tokei, Zsolt (2013) -
Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials
Wu, Chen; Li, Yunlong; Lesniewska, Alicja; Varela Pedreira, Olalla; de Marneffe, Jean-Francois; Ciofi, Ivan; Verdonck, Patrick; Baklanov, Mikhaïl; Boemmels, Juergen; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof (2015) -
Cryogenic etching reduces plasma-induced damage of ultralow-k dielectrics
Baklanov, Mikhaïl; de Marneffe, Jean-Francois; Zhang, Liping; Ciofi, Ivan; Tokei, Zsolt (2014) -
Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Rutigliani, Vito; Decoster, Stefan; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014)