Authors

Goethals, Frederik; Baklanov, Mikhaïl; Ciofi, Ivan; Detavernier, Christophe; Van Der Voort, Pascal; Van Driessche, Isabel

ISSN

1359-7345

Issue

22

Journal

Chemical Communications

Volume

48

Title

A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers

Publication type

Journal article