Publication:
A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers
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1911 since deposited on 2021-10-20
4last month
1last week
Acq. date: 2026-01-11
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1911 since deposited on 2021-10-20
4last month
1last week
Acq. date: 2026-01-11
Citations