Publication:

Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials

Date

2014
Meeting abstract
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Author(s)

de Marneffe, Jean-Francois  
;
Zhang, Liping  
;
Heyne, Markus
;
Krishtab, Mikhail  
;
Goodyear, Andy
;
Cooke, Mike
;
Heylen, Nancy  
;
Ciofi, Ivan  
;
Wen, Liang Gong
;
Wilson, Chris  
;
Rutigliani, Vito
;
Decoster, Stefan  
;
Savage, Travis
;
Matsunaga, Koichi
;
Nafus, Kathleen  
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
Baklanov, Mikhaïl

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