CMOS 32nm technology node: business as usual for interconnect damascene patterning?

Thumbnail
View/open
Metadata
Show full item record
Authors
Beyer, Gerald; Ciofi, Ivan; Van Olmen, Jan; Carbonell, Laure; Versluijs, Janko; Wiaux, Vincent; Op de Beeck, Maaike; Maenhoudt, Mireille; Struyf, Herbert; Hendrickx, Dirk; de Marneffe, Jean-Francois; Vereecke, Guy; Claes, Martine; Bearda, Twan; Volders, Henny; Heylen, Nancy; Travaly, Youssef; Stucchi, Michele; Tokei, Zsolt; Cartuyvels, Rudi
ISSN
1355-8633
Journal
Semiconductor Fabtech
Volume
38
Title
CMOS 32nm technology node: business as usual for interconnect damascene patterning?
Publication type
Journal article
Embargo date
9999-12-31
Collections