Publication:

Kinetics of chemical etching in nano-confined volumes

Date

2016
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Vereecke, Guy  
;
De Coster, Hanne  
;
Carolan, Patrick  
;
Bender, Hugo  
;
Willems, Kherim  
;
Ragnarsson, Lars-Ake  
;
Van Dorpe, Pol  
;
Horiguchi, Naoto  
;
Holsteyns, Frank  

Journal

Abstract

Description

Statistics

Views

2024 since deposited on 2021-10-23
Acq. date: 2026-10-10

Citations

Statistics

Views

2024 since deposited on 2021-10-23
Acq. date: 2026-10-10

Citations