Publication:

Kinetics of chemical etching in nano-confined volumes

Date

2016

Meeting abstract

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Author(s)

;

De Coster, Hanne

;

Carolan, Patrick

;

;

Willems, Kherim

;

Ragnarsson, Lars-Ake

;

;

Horiguchi, Naoto

;

Holsteyns, Frank

Statistics

2022 since deposited on 2021-10-23

Acq. date: 2026-04-27