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Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions
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Authors
Le, Quoc Toan
;
Arslan, Esen
;
Rip, Jens
;
De Coster, Hanne
;
Verdonck, Patrick
;
Radisic, Dunja
;
Schleicher, Filip
;
Vaesen, Inge
;
Conard, Thierry
;
Altamirano Sanchez, Efrain
DOI
10.1016/j.mne.2023.100208
ISSN
2590-0072
Issue
June
Journal
MICRO AND NANO ENGINEERING
Volume
19
Title
Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions
Publication type
Journal article
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2
20.500.12860/42366.2
*
2023-10-11T10:19:41Z
validation by library/open access desk
1
20.500.12860/42366
2023-08-20T18:03:12Z
*Selected version
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