dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Arslan, Esen | |
dc.contributor.author | Rip, Jens | |
dc.contributor.author | De Coster, Hanne | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Radisic, Dunja | |
dc.contributor.author | Schleicher, Filip | |
dc.contributor.author | Vaesen, Inge | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.date.accessioned | 2023-10-11T10:26:14Z | |
dc.date.available | 2023-08-20T18:03:12Z | |
dc.date.available | 2023-10-11T10:26:14Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2590-0072 | |
dc.identifier.other | WOS:001042681800001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42366.2 | |
dc.source | WOS | |
dc.title | Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions | |
dc.type | Journal article | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Arslan, Esen | |
dc.contributor.imecauthor | Rip, Jens | |
dc.contributor.imecauthor | De Coster, Hanne | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Radisic, Dunja | |
dc.contributor.imecauthor | Schleicher, Filip | |
dc.contributor.imecauthor | Vaesen, Inge | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | Rip, Jens::0009-0006-7414-2898 | |
dc.contributor.orcidimec | De Coster, Hanne::0000-0002-5968-7703 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Schleicher, Filip::0000-0003-3630-7285 | |
dc.contributor.orcidimec | Vaesen, Inge::0000-0003-3533-4679 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Altamirano Sanchez, Efrain::0000-0003-3235-6055 | |
dc.identifier.doi | 10.1016/j.mne.2023.100208 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 100208 | |
dc.source.endpage | na | |
dc.source.journal | MICRO AND NANO ENGINEERING | |
dc.source.issue | June | |
dc.source.volume | 19 | |
imec.availability | Published - imec | |