Browsing by author "Verdonck, Patrick"
Now showing items 1-20 of 153
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21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
3D stacked IC demonstration using a through silicon via first approach
Van Olmen, Jan; Mercha, Abdelkarim; Katti, Guruprasad; Huyghebaert, Cedric; Van Aelst, Joke; Seppala, Emma; Zhao, Chao; Armini, Silvia; Vaes, Jan; Cotrin Teixeira, Ricardo; Van Cauwenberghe, Marc; Verdonck, Patrick; Verhemeldonck, Koen; Jourdain, Anne; Ruythooren, Wouter; de Potter de ten Broeck, Muriel; Opdebeeck, Ann; Chiarella, Thomas; Parvais, Bertrand; Debusschere, Ingrid; Hoffmann, Thomas Y.; De Wachter, Bart; Dehaene, Wim; Stucchi, Michele; Rakowski, Michal; Soussan, Philippe; Cartuyvels, Rudi; Beyne, Eric; Biesemans, Serge; Swinnen, Bart (2008) -
A high-reliable Cu/ULK integration scheme using Metal Hard Mask and Low-k capping film
Travaly, Youssef; Tsutsue, M.; Ikeda, Atsushi; Verdonck, Patrick; Tokei, Zsolt; Willegems, Myriam; Van Aelst, Joke; Struyf, Herbert; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Claes, Martine; Heylen, Nancy; Sinapi, Fabrice; Richard, Olivier; De Roest, David; Kaneko, S; Kemeling, N; Fukazawa, A; Matsuki, N; Matsushita, K; Tsuji, N; Kagami, K; Sprey, Hessel; Beyer, Gerald (2007) -
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus
Verdonck, Patrick; Wang, Cong; Le, Quoc Toan; Souriau, Laurent; Vanstreels, Kris; Krishtab, Mikhail; Baklanov, Mikhaïl (2014) -
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus
Verdonck, Patrick; Wang, Cong; Souriau, Laurent; Vanstreels, Kris; Baklanov, Mikhaïl (2013) -
ALD barrier deposition on porous low-k dielectric materials for interconnects
Van Elshocht, Sven; Delabie, Annelies; Dewilde, Sven; Meersschaut, Johan; Swerts, Johan; Tielens, Hilde; Verdonck, Patrick; Witters, Thomas; Vancoille, Eric (2011-10) -
An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, K; Dendooven, Jolien; Verdonck, Patrick; Baklanov, Mikhaïl; Detavernier, Christoph (2013) -
Analysis of the etch rate limiting steps in dry etching of tungsten in fluorine containing plasmas
Verdonck, Patrick; Swart, J.; Brasseur, Guy; De Geyter, Pascal (1994) -
Analysis of the etching mechanisms of tungsten in fluorine containing plasmas
Verdonck, Patrick; Swart, J.; Brasseur, Guy; De Geyter, Pascal (1995) -
Atomic layer deposition of 2D transition metal dichalogenides
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015-10) -
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, Kilain; Dendooven, Jolien; Ludwig, Karl; Verdonck, Patrick; Meersschaut, Johan; Baklanov, Mikhaïl; Detavernier, Christophe (2013) -
Challenges in uniform etching of Ruthenium
Le, Quoc Toan; Verdonck, Patrick; Pacco, Antoine; Altamirano Sanchez, Efrain (2021) -
Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Verdonck, Patrick; De Roest, David; Kaneko, Shinya; Caluwaerts, Rudy; Tsuji, Naoto; Matsushita, Kiyohiro; Kemeling, Nathan; Travaly, Youssef; Sprey, Hessel; Schaekers, Marc; Beyer, Gerald (2007) -
Characterization by GISAXS and electrochemical impedance spectroscopy of porous oxide films
Huanca, Danilo; Verdonck, Patrick; Dias, Carlos; Petersen Barbosa Lima, Lucas; Van Elshocht, Sven; dos Santos, Sebastiao; Witters, Thomas (2018) -
Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry
Kim, Tae-Gon; Verdonck, Patrick; Ciofi, Ivan; Barbarin, Yohan; Tokei, Zsolt; Baklanov, Mikhaïl (2013) -
Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
Uedono, Akira; Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Witters, Thomas; Conard, Thierry; Baklanov, Mikhaïl; Van Elshocht, Sven; Oshima, Nagayasu; Suzuki, Ryoichi (2013) -
Chemisorption of ALD precursors in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, Leo; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, Thomas; Nyns, Laura; Van Elshocht, Sven (2013) -
Comparative study of the growth behaviour of 2D WS2 by Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), and the impact on the 2D crystal structure
Groven, Benjamin; Claes, Dieter; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Thean, Aaron; Heyns, Marc; Caymax, Matty; Delabie, Annelies (2016) -
Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials
Wu, Chen; Li, Yunlong; Lesniewska, Alicja; Varela Pedreira, Olalla; de Marneffe, Jean-Francois; Ciofi, Ivan; Verdonck, Patrick; Baklanov, Mikhaïl; Boemmels, Juergen; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof (2015) -
Crystal orientation dependent anisotropic dry silicon etching
Trompoukis, Christos; El Daif, Ounsi; Verdonck, Patrick; Niesen, Bjoern; Ben Yaala, Marwa; Depauw, Valerie; Gordon, Ivan; Poortmans, Jef (2013)